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Rajasekhar Kuppa

from Santa Clara, CA
Age ~42

Rajasekhar Kuppa Phones & Addresses

  • 1102 Pomeroy Ave, Santa Clara, CA 95051 (408) 260-7434
  • Arlington, TX
  • 330 Elan Village Ln, San Jose, CA 95134 (408) 493-5156
  • Sunnyvale, CA

Publications

Us Patents

Apparatus And Methods For Real-Time Three-Dimensional Sem Imaging And Viewing Of Semiconductor Wafers

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US Patent:
2012022, Sep 6, 2012
Filed:
Mar 4, 2011
Appl. No.:
13/041017
Inventors:
Paul D. MacDONALD - Tracy CA,
Rajasekhar KUPPA - Santa Clara CA,
Takuji TADA - San Jose CA,
Gordon ABBOTT - Pleasanton CA,
Cho TEH - Los Altos CA,
Hedong YANG - Santa Clara CA,
Stephen LANG - Hollis NH,
Mark A. NEIL - San Jose CA,
Zain SAIDIN - San Mateo CA,
International Classification:
G01N 23/04
US Classification:
250307, 250310
Abstract:
One embodiment relates to a method of real-time three-dimensional electron beam imaging of a substrate surface. A primary electron beam is scanned over the substrate surface causing electrons to be emitted therefrom. The emitted electrons are simultaneously detection using a plurality of at least two off-axis sensors so as to generate a plurality of image data frames, each image data frame being due to electrons emitted from the substrate surface at a different view angle. The plurality of image data frames are automatically processed to generate a three-dimensional representation of the substrate surface. Multiple views of the three-dimensional representation are then displayed. Other embodiments, aspects and features are also disclosed.
Rajasekhar Kuppa from Santa Clara, CA, age ~42 Get Report